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阿卜杜拉国王科技大学高级研究员讲座

: 2016-07-01


王志宏,阿卜杜拉国王科技大学(沙特)先进纳米制造中心实验室高级研究员。1984年和1989年分别于兰州大学物理系和材料科学系获理学学士和硕士学位。1995年起在西安交通大学师从姚熹院士攻读博士,1999年获工学博士学位。1999年加入SAE Magnetics (H.K.) Ltd.先进元件开发部,任经理兼主任工程师,负责微位移致动器及相应硬盘磁头悬浮臂的研究开发。2000年至2009年在新加坡南洋理工大学从事铁电薄膜和压电微电子机械系统 (Piezo-MEMS) 的研究工作。2009年加入阿卜杜拉国王科技大学,负责先进纳米制造中心实验室的筹建和运行。目前的研究兴趣包括纳米制造工艺,硅衬底上集成压电超声传感器以及外延薄膜中的挠电效应等.


3D laser lithography and its applications

Conventional lithography, such as e-beam lithography, is inherently limited to the production of planar patterns. During the past decade, a true three dimensional (3D) direct laser printing has been developed by utilizing two-photon absorption in femtosecond laser pulse. In contrast to conventional lithography, 3D laser lithography uses a near infrared laser which cannot be directly absorbed by a UV curable photoresist. However, when the laser beam is focused within the photoresist, the two-photon absorption happens in the focal volume (voxel). The photoresist is thus exposed within the spatially confined absorption voxel. By precisely scanning the voxel along predefined three dimensional paths in photoresist, arbitrary complex 3D structures can be fabricated with feature size as small as 200 nm. Among a large variety of applications, the most prominent examples are metamaterials, photonic crystals, optical interconnect, cell-biology, tissue engineering, microfluidics and porous battery electrode. The 3D laser lithography is one of the lithography capabilities of Advanced Nanofabrication Core Lab which is among the 8 different core labs of King Abdullah University of Science and Technology (KAUST). The core Labs of KAUST will also be briefly introduced during the talk.